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3‐1: Distinguished Paper: Foldable LTPS TFT Backplane using Blue Laser Annealing
Author(s) -
Lee Suhui,
Do Youngbin,
Kim Dongjin,
Jang Jin
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14595
Subject(s) - thin film transistor , backplane , materials science , amoled , optoelectronics , transistor , annealing (glass) , electrical engineering , voltage , composite material , engineering , layer (electronics) , active matrix
The crystallization of a‐Si by blue laser annealing (BLA) is introduced for low‐cost high resolution, thin‐film transistor (TFT) backplanes for foldable and rollable AMOLED displays. A big advantage of BLA is to provide low temperature polycrystalline silicon (LTPS) with protrusion‐free active channel. The BLA LTPS TFT manufactured on flexible substrate exhibits high field effect mobility of 169 cm2/Vs, a subthreshold voltage swing less than 201 mV/dec and excellent electrical stability and mechanical robustness.