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P‐13.8: Fabrication of Al 2 O 3 /alucone Nanolaminates Using ALD/MLD and its Application to OLED Encapsulation
Author(s) -
Chen Guixiong,
Weng Yalian,
Zhang Yongai,
Wu Chaoxing,
Yan Qun,
Guo Tailiang,
Zhou Xiongtu
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14584
Subject(s) - oled , atomic layer deposition , materials science , encapsulation (networking) , fabrication , diode , transmission rate , chemical vapor deposition , optoelectronics , layer (electronics) , nanotechnology , transmission (telecommunications) , computer science , medicine , computer network , alternative medicine , pathology , telecommunications
Thin film encapsulation (TFE) is vital for flexible organic light‐emitting diodes (OLEDs). In this work, the Al 2 O 3 /alucone nanolaminates grown by atomic layer deposition (ALD) and molecular layer deposition (MLD) were investigated as TFE for OLEDs. It was found that alucone film with the suitable thickness could better flatten Al 2 O 3 film by filling the defects. The nanolaminates of 15/2.5 nm Al 2 O 3 / alucone had high density to minimize the pass of water vapor, and the barrier properties were improved with the increasing number of dyads. The water vapor transmission rate (WVTR) could reached 1.44×10 −4 g/m 2 /day with 5.5 dyads nanolaminates in a control environment of 25 °C, 60% RH. The lifetime (L/L 0 =0.5) of a green OLED could reached more than 380h using 5dyads nanolaminates as encapsulation layer. The result indicated a promising encapsulation method to prolong the lifetime of OLED.