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P‐13: Large Subthreshold Swing of LTPS TFTs by Efficient Annealing Method for Light Emitting Diode Displays
Author(s) -
Saito Takao,
Kanzaki Yosuke,
Miwa Masahiko,
Yamanaka Masaki,
Sun Yi,
Kaneko Seiji,
Kataoka Yoshiharu
Publication year - 2020
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14136
Subject(s) - oled , thin film transistor , materials science , optoelectronics , backplane , subthreshold conduction , annealing (glass) , swing , diode , computer science , transistor , electrical engineering , computer hardware , engineering , voltage , nanotechnology , mechanical engineering , layer (electronics) , composite material
In the OLED backplane process, we have succeeded in controlling the TFT characteristics by optimizing the condition of hydrogenation annealing. This resulted in the good gray level control of the OLED display. We have finally developed the OLED smartphone display using this technology.