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61‐4: Invited Paper: Development of the OLED Mass‐Production System
Author(s) -
Matsumoto Eiichi
Publication year - 2020
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14020
Subject(s) - oled , cluster (spacecraft) , production line , production (economics) , substrate (aquarium) , productivity , materials science , process engineering , environmental science , computer science , engineering , nanotechnology , mechanical engineering , operating system , layer (electronics) , economics , macroeconomics , oceanography , geology
Canon Tokki has developed a vapor deposition system for OLED mass production. The Substrate size is G6H (half‐size generation six (G6)) panel compatible, cluster type equipment, and productivity of 15k sheets per month (G6 size conversion). We have also developed an in‐line system for OLED‐TV production on G8H size panels and vertical G6F (full‐size G6 panel) equipment to meet future demands