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21‐2: Invited Paper: 1µm Pixel Pitch Spatial Light Modulator Panel for Digital Holography
Author(s) -
Hwang Chi-Sun,
Choi Ji Hun,
Pi Jae-Eun,
Yang Jong-Heon,
Kim Gi Heon,
Kim Yong-Hae,
Kim Joo Yeon,
Lee Won-Jae,
Kim Hee-Ok,
Lee Ha Kyun,
Kim MyungYu,
Kim Jinwoong
Publication year - 2020
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13862
Subject(s) - spatial light modulator , dot pitch , pixel , holography , optics , interference (communication) , materials science , channel (broadcasting) , moiré pattern , holographic data storage , optoelectronics , physics , computer science , telecommunications
Digital hologram images reconstructed through interference of the modulated light waves requires ultra high resolution display panel. BCE oxide TFTs with channel width of 0.5µm and channel length of 2µm were stacked on data line for the integration of 1µm pitch pixel. 1µm pixel pitch 16K spatial light modulator on glass substrate was successfully fabricated with vertically stacked TFT structure.