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14‐3: Flexible Image Sensor Array Using IGZO TFT Backplane Technology for X‐ray Detector
Author(s) -
Takita Rikiya,
Nakamura Wataru,
Kubota Akinori,
Nakano Fumiki,
Tomiyasu Kazuhide,
Nakamura Yu,
Makita Naoki
Publication year - 2020
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13833
Subject(s) - thin film transistor , backplane , detector , amorphous silicon , optoelectronics , substrate (aquarium) , materials science , image sensor , oxide thin film transistor , silicon , optics , computer science , computer hardware , nanotechnology , physics , crystalline silicon , oceanography , layer (electronics) , geology
A flexible X‐ray sensor array using IGZO‐TFT was prototyped. It is known that IGZO‐TFT shows faster read‐out speed compared to amorphous silicon TFT. With such superior characteristics, IGZO‐TFT yield dynamic motion X‐ray detectors with great performance. In addition, flexible substrate realizes light‐weight and robust detector. In this paper we evaluated the IGZO‐TFT flexible sensor array and it showed good characteristics.