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9‐2: Manufacturing Process for Mass Production of Micro‐LED Displays and High‐Speed and High‐Yield Laser Lift‐Off Systems
Author(s) -
Kajiyama Koichi,
Suzuki Yoshikazu,
Hirano Takafumi,
Yanagawa Yoshikatu,
Fukaya Koichiro,
Okura Naoya,
Okuno Takeshi,
Shimoura Atushi
Publication year - 2020
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13814
Subject(s) - lift (data mining) , backplane , laser , chip , materials science , optoelectronics , laser diode , diode , process (computing) , yield (engineering) , computer science , computer hardware , optics , physics , telecommunications , composite material , data mining , operating system
In our previous work, we proposed and evaluated processes and equipment to facilitate the mass production of micro LED (light emitting diode) displays. The new technologies include LLO (laser lift off), mass‐transfer, color conversion and backplane with micro Si chip. We quantitatively evaluated them and report results.