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Development of High‐yield Laser Lift‐off Process for Micro LED Display
Author(s) -
Xia Jiye,
Dong Xiaobiao,
Yao Zhibo,
Sheng Cuicui,
Li Zhisheng,
Cao Xuan,
Wang Chenggong,
Duan Lian
Publication year - 2020
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13750
Subject(s) - lift (data mining) , laser , materials science , process (computing) , yield (engineering) , optoelectronics , process engineering , mechanical engineering , computer science , optics , engineering , composite material , physics , data mining , operating system
This paper reports our developments for Micro LED laser lift‐off which is a very important step in Micro LED mass transfer process. By selecting the temporary bonding material, optimizing laser power intensity and other process parameters, the yield of Micro LED laser lift‐off can reach 99.87% for more than 1500 LEDs. This technical developments is of great potential for promoting high‐yield mass transfer technology to realize commercial Micro‐LED displays.