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P‐4.3: Reflective Color filters based on subwavelength diffraction gratings
Author(s) -
Meng Xianqin,
Niu Haijun,
Wang Wei,
Ma Sen,
Meng Xiandong,
Chen Xiaochuan
Publication year - 2019
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13618
Subject(s) - cyan , color gel , color filter array , optics , lithography , materials science , gamut , wavelength , optoelectronics , diffraction , diffraction grating , etching (microfabrication) , grating , layer (electronics) , physics , nanotechnology , thin film transistor
This report discusses a potential reflected color filter for colorful display device. In this design, diffraction gratings could be color filter, reflect specific wavelengths to present blue, green, and red, even cyan and yellow. A 120nm silicon layer lays on a quartz substrate, and the silicon layer was patterned to generate a two‐dimensional circular pillars with different geometric parameters from 180nm pitch to 350nm Meanwhile, it has good tolerance to pillars shape and lattice parameters which are friendly news for volume production. Last but not least, these structures are independence of the polarization and insensitive angular of the incident light of 30°. These RGBCY five primary colors will extend the color gamma to 143% of NTSC. Designed structures can be volume fabricated by nano‐imprint lithography and etching processes.