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47.2: Lithography Simulation and OPC for Next Generation Display Technology
Author(s) -
Taksatorn Nit,
Yoshida Koichiro
Publication year - 2019
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13550
Subject(s) - session (web analytics) , computer graphics (images) , computer science , font , corporation , citation , liquid crystal display , library science , world wide web , operating system , political science , law
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