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P‐178: Flexible AMOLED Display Fabricated by Mask‐less Digital Lithography Technology
Author(s) -
Chen Wei-Chung,
Liou Wei-Tong,
Jung Chi-Wen,
Chen Glory,
Ho Jia-Chong,
Chen Janglin,
Lee Cheng-Chung
Publication year - 2019
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13335
Subject(s) - amoled , backplane , materials science , lithography , thin film transistor , optoelectronics , substrate (aquarium) , active matrix , nanotechnology , electrical engineering , engineering , layer (electronics) , oceanography , geology
Low temperature polycrystalline silicon (LTPS) TFT backplane for AMOLED display was successfully demonstrated on PI substrate by mask‐less digital lithography technology (DLT). LTPS TFTs fabricated with resolution of 4µm and overlay accuracy within 1.5µm, show electrical properties: field‐effect mobility of 70 cm 2 /Vs, V th of −0.31 V, and S.S. of 0.37 V/decade, respectively.