P‐178: Flexible AMOLED Display Fabricated by Mask‐less Digital Lithography Technology | Zendy

Chen Wei-Chung | Zendy; Liou Wei-Tong | Zendy; Jung Chi-Wen | Zendy; Chen Glory | Zendy; Ho Jia-Chong | Zendy; Chen Janglin | Zendy; Lee Cheng-Chung | Zendy

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P‐178: Flexible AMOLED Display Fabricated by Mask‐less Digital Lithography Technology

Author(s) -

Chen Wei-Chung,

Liou Wei-Tong,

Jung Chi-Wen,

Chen Glory,

Ho Jia-Chong,

Chen Janglin,

Lee Cheng-Chung

Publication year - 2019

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1002/sdtp.13335

Subject(s) - amoled , backplane , materials science , lithography , thin film transistor , optoelectronics , substrate (aquarium) , active matrix , nanotechnology , electrical engineering , engineering , layer (electronics) , oceanography , geology

Low temperature polycrystalline silicon (LTPS) TFT backplane for AMOLED display was successfully demonstrated on PI substrate by mask‐less digital lithography technology (DLT). LTPS TFTs fabricated with resolution of 4µm and overlay accuracy within 1.5µm, show electrical properties: field‐effect mobility of 70 cm 2 /Vs, V th of −0.31 V, and S.S. of 0.37 V/decade, respectively.

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