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P‐62: Study on the mechanism of Block Mura in the ITO developing process via utilizing CFD simulation
Author(s) -
Li Xiaobao,
Zhang Zhihai,
Chen Cheng,
Liu Zhaofan,
YOUN YANGSIK,
Chen Junsheng,
LEE SEUNGKYU
Publication year - 2019
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13217
Subject(s) - mura , computational fluid dynamics , block (permutation group theory) , process (computing) , computer science , mechanism (biology) , simulation , engineering drawing , engineering , mathematics , aerospace engineering , physics , geometry , liquid crystal display , operating system , quantum mechanics
Herein the Block Mura is discussed. We analyze the formation mechanism of Block Mura in the ITO developing process with CFD simulation. A detailed study has carried out on the design of 2 nd ITO layer. Experimental results show that Block Mura can be quickly and effectively solved by using CFD simulation.