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76‐2: Fine Glass Masks (FGMs) for OLED Manufacturing Made by Laser Induced Deep Etching (LIDE)
Author(s) -
Dunker Daniel,
Ostholt Roman,
Delrue Jean-Pol
Publication year - 2019
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13116
Subject(s) - oled , materials science , etching (microfabrication) , deposition (geology) , laser , optoelectronics , composite material , optics , physics , layer (electronics) , geology , paleontology , sediment
Fine‐metal‐masks (FMM) which are predominantly used today for structured OLED material deposition are associated with drawbacks such as shadowing effects, wrinkles and significant costs. This paper discusses the status of fine‐glass‐masks (FGM) as a replacement for FMM in high density OLED deposition.