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71‐2: Novel Optical Image Sensor Array Using LTPS‐TFT Backplane Technology as Fingerprint Recognition
Author(s) -
Liu Bozhi,
Shi Xiaoqi,
Cai Shoujin,
Cai Xuanxian,
Lan Xuexin,
Chen Guozhao,
Li Junyi
Publication year - 2019
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.13096
Subject(s) - backplane , amorphous silicon , materials science , optoelectronics , thin film transistor , fingerprint (computing) , diode , photodiode , layer (electronics) , silicon , fingerprint recognition , image sensor , photosensitivity , computer science , crystalline silicon , computer hardware , artificial intelligence , nanotechnology
A novel photo sensor by LTPS TFT backplane technology is developed, which amorphous silicon (a‐Si) layer stacks on poly silicon (p‐Si) layer to form a vertical hybrid poly and amorphous silicon PIN photo diode (HPAS‐PIN). This photo diode shows good photosensitivity as traditional a‐Si photo sensor. An optical fingerprint sensor array is realized based on the novel HPAS‐PIN photo diode and successfully capturing fingerprint image.