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18‐2: Ultra‐Fine High Efficiency MicroLEDs with Testability and Transferability Using Layer‐Transfer Technology
Author(s) -
Lee Dong,
Cherekdjian Sarko,
Kang Sien,
Mishra Kamal,
Ong Philip,
Xu Xiaoqing
Publication year - 2019
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12899
Subject(s) - template , materials science , layer (electronics) , transferability , testability , modularity (biology) , nanotechnology , optoelectronics , computer science , engineering , reliability engineering , logit , machine learning , biology , genetics
Layer‐transferred high quality GaN and GaAs QMAT templates make LED efficiency enhancements for super thin (<2um) and ultra‐fine (<5um) microLED structures. Templates have pre‐patterns which minimize sidewall loss, eliminate dry etch damage, and intrinsically control street width and die size.