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13.1: Invited Paper: Single‐Photon‐Capable Detector Arrays in CMOS—Exploring a New Tool for Display Metrology
Author(s) -
Underwood Ian,
Mai Hanning,
Al-Abbas Tarek,
Gyongy Istvan,
Dutton Neale A.W.,
Henderson Robert K.
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12838
Subject(s) - cmos , metrology , detector , single photon avalanche diode , diode , photon , point (geometry) , physics , electrical engineering , optoelectronics , computer science , engineering , optics , avalanche photodiode , geometry , mathematics
The technology of CMOS‐compatible Single Photon Avalanche Diodes is evolving rapidly and has matured to the point at which it can address the requirements of a range of imaging applications. In this report we consider the current suitability and future potential of CMOS‐compatible Single Photon Avalanche Diodes to address the particular application of display metrology.