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P‐6.11: Sensor Technology ‐ A new chance for low generation TFT production line
Author(s) -
Wang Zhidong,
Lan Ronghua,
Zhou Lijia,
Zhang Junrui,
Yan Rongjian,
Cheng Jiuyang,
Zhou Quanguo,
Guo Meng,
Li Yongqiang,
Lu Yancheng
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12802
Subject(s) - thin film transistor , microelectromechanical systems , optoelectronics , substrate (aquarium) , materials science , production line , detector , electrical engineering , nanotechnology , engineering , mechanical engineering , oceanography , layer (electronics) , geology
We analyzed several sensor technology which have good compatibility with current TFF process, including Digital X‐Ray Detector, Glass‐substrate Pressure Sensor, Glass‐substrate Memory, Glass‐substrate Antenna and Glass‐substrate MEMS Devices. The above offers some directions for low generation TFT production line's transition.