Premium
24.4: High Performance Top‐gate Self‐aligned Coplanar a‐IGZO TFTs with Light Shielding Metal Design
Author(s) -
Song Zhen,
Wang Guoying,
Chen Jiangbo,
Gu Pengfei,
Liu Fengjuan,
Xie Dini,
Liu Wei,
Sun Hongda,
Song Young Suk,
Yan Liangchen,
Wu Zhongyuan
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12696
Subject(s) - backplane , materials science , electromagnetic shielding , optoelectronics , thin film transistor , oled , shielding effect , electrical engineering , nanotechnology , composite material , engineering , layer (electronics)
The TG‐SA a‐IGZO TFTs with different light shielding metal (SM) layers design were demonstrated and compared in this paper. Their electrical characteristics have been measured in order to systematically analyze the effect that the SMs ever made on. The relationship between device instability and different SMs design have been systematically analyzed. Then the prototype 14″ OLED display with an excellent performance using TG‐SA a‐IGZO TFTs backplane have been made successfully, which indicates an excellent mass‐production prospect.