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45‐3: Invited Paper: Enabling the Next Era of Display Technologies by Micro LED MOCVD Processing
Author(s) -
Beckers Arthur,
Fahle Dirk,
Mauder Christof,
Kruecken Thomas,
Boyd Adam R.,
Heuken Michael
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12413
Subject(s) - metalorganic vapour phase epitaxy , light emitting diode , nanotechnology , computer science , materials science , telecommunications , optoelectronics , epitaxy , layer (electronics)
Conventional Display Technologies are being challenged by the emergence of Micro LED Display Technology. AIXTRON identifies the increased MOCVD requirements Micro LED applications are bringing and how these can be addressed. We present progress on improvements to MOCVD processing of red, green and blue Micro LEDs based on Planetary technology.