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57‐4: Experimental Demonstration of Quasi‐CW SBC of Si Films Using Ultra‐High‐Frequency UV Fiber Lasers
Author(s) -
Song Ruobing,
Choi Insung,
Pan Wenkai,
Yu Miao,
Im James S.
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12350
Subject(s) - laser , materials science , optoelectronics , excimer laser , fiber laser , optics , annealing (glass) , composite material , physics
The Q‐SBC method is a new laser annealing process. It is technically and procedurally quite distinct from, and as a result possesses certain process‐ and material‐related benefits compared to, the existing line‐beam and/or excimer‐laser‐based techniques. Here, we present preliminary yet definitive Q‐SBC experimental results (obtained using an ultra‐high‐frequency UV fiber laser) that support the foundational concept of the method, and demonstrate further that ELA‐generated‐like polycrystalline Si films can be obtained using the SB‐FLA version of the Q‐SBC approach.