Premium
50‐2: Accelerating Advanced Display Fab Yield Ramp with Innovative Autonomous Inline Electron Beam Review System
Author(s) -
Choi SoonShin,
Zhang Xuena,
Wu Shengji,
Wan ChangJun,
Han Ben,
Liu Wei,
Wu Gang,
Du Kaiyao,
Miao Sheng,
Han ZhiHui,
Lin DaoBin,
Mueller Bernhard,
Li Lingjia,
Meng Lin,
Feng Yinqiao,
Sun Junyu,
Virdi Kulpreet Singh,
Daiker Volker,
Schueler Bernhard,
Trauner Robert,
Staffansson Peter,
Ledl Ludwig,
McDadiel Max,
Nunan Peter
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12331
Subject(s) - electronics , china , engineering , electrical engineering , geography , archaeology