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P‐130: Reliable Flexible Elevated Metal Metal‐Oxide IGZO TFTs
Author(s) -
Bebiche Sarah,
Wang Sisi,
Lei Lu,
Wong Man,
Kwok Hoi-Sing
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12314
Subject(s) - materials science , oxide , metal , optoelectronics , thin film transistor , robustness (evolution) , composite material , metallurgy , layer (electronics) , chemistry , biochemistry , gene
Flexible EMMO IGZO TFTs fabricated on 20 µm thick PI film are reported here. The utilized technology results in high electrical stability, of devices, combined to high robustness against mechanical deformation down to 3%.