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P‐125: Monochromatic Active Matrix Micro‐LED Micro‐displays with >5,000 dpi Pixel Density Fabricated using Monolithic Hybrid Integration Process
Author(s) -
Ou Fang,
Chong Wing Cheung,
Xu Qunchao,
Chen Yijing,
Li Qiming,
Zhang Lei
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12309
Subject(s) - monochromatic color , active matrix , wafer , materials science , realization (probability) , pixel , optoelectronics , matrix (chemical analysis) , process (computing) , nanotechnology , thin film transistor , optics , computer science , physics , mathematics , composite material , statistics , layer (electronics) , operating system
We report the realization of monochromatic red, green and blue active matrix micro‐LED micro‐displays with >5,000 dpi pixel density. The micro‐displays were fabricated using a wafer‐scale monolithic hybrid integration process which shows feasibility and advantages for the mass production. The micro‐displays demonstrated are of great potentials in augmented reality applications.