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76‐4: Late-News Paper: Flat Panel Fingerprint/Touch‐input Image Sensor Using a‐Si TFT Photo‐transistor and Four‐Mask Process Architecture Technology
Author(s) -
Cho An-Thung,
Liu Zhen,
Liu Kai-jun,
Yang Feng-yun,
Mo Qiong-hua,
Hsu James,
Chen Wade,
Lu York
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12195
Subject(s) - thin film transistor , photodiode , image sensor , transistor , fingerprint (computing) , pixel , optoelectronics , materials science , process (computing) , amorphous silicon , reliability (semiconductor) , flat panel display , layer (electronics) , computer science , silicon , electrical engineering , engineering , artificial intelligence , crystalline silicon , nanotechnology , physics , power (physics) , quantum mechanics , voltage , operating system
An Optical type fingerprint scanning/touch‐input flat panel is designed. The driving system is based on the passive pixel sensor (PPS) array with amorphous silicon (a‐Si) TFT technology. The embedded sensing structure of the optical sensor is using the a Si TFT phototransistor and four‐mask process architecture technology. The pixel density is over 500 PPI and the a‐Si TFT phototransistor sensor is high reliability by using Multi‐N+ layer in the a‐Si TFT structure.