Premium
P‐71: On the Origin and Significance of Melting Dimensionality in ELA of Si films
Author(s) -
Pan Wenkai,
Wong Ver,
Yu Miao,
Song Ruobing,
Choi Insung,
Im James S.
Publication year - 2018
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.12186
Subject(s) - superheating , materials science , curse of dimensionality , melting point , grain boundary , crystallite , oxide , point (geometry) , thermodynamics , metallurgy , composite material , microstructure , mathematics , geometry , physics , statistics
Our recent investigations have revealed that substantially 2D melting transpires during the ELA process. In this paper, we first present the experimental finding that shows how this behavior at least stems intrinsically from the presence in the material of melt‐prone grain boundaries and superheating‐permitting Si‐oxide interface. We also point out, and substantiate with numerical simulation results, that the manifested dimensionality of melting can figure in affecting (1) the energy utilization efficiency of the ELA method, as well as (2) the microstructural uniformity of the resulting polycrystalline materials.