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P‐72: Invar Fe‐Ni Alloy Metallization by Electroless Plating for TFTs
Author(s) -
Yamamoto Takayo,
Nagayama Tomio,
Nakamura Toshihiro
Publication year - 2017
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.11937
Subject(s) - invar , materials science , alloy , substrate (aquarium) , plating (geology) , metallurgy , electroless plating , composite material , layer (electronics) , electroplating , oceanography , geophysics , geology
We prepared an Fe‐Ni alloy film with a CTE equivalent to that of glass substrate for TFT using electroless plating. The electroless deposited Fe‐Ni alloy films with Fe contents of 55 and 64 wt% in the invar composition range had CTE values of 8 ppm/°C which is lower than that of Ni films and comparable with that of glass substrate.