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P‐25: The Analysis of Kink Effect in LTPS TFTs with LDD and Source Contacted Bottom Shield Metal
Author(s) -
Kim Ki Woo,
Kang Jong Suk,
Shin Dona Jae,
Ku Hoewoo,
Kang In Byeong,
Lee Kyung Ho,
Kim Hyun Jae
Publication year - 2017
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.11890
Subject(s) - materials science , electrode , optoelectronics , substrate (aquarium) , shield , thin film transistor , layer (electronics) , buffer (optical fiber) , metal , oled , composite material , electrical engineering , metallurgy , engineering , chemistry , oceanography , geology , petrology
In plastic OLED (POLED) displays, bottom shield metal (BSM) layer is applied to eliminate the effect of mobile charges within plastic substrate. However, this BSM causes the abnormal kink effect, which is significantly different from the conventional LTPS TFTs with LDD. In the study, we investigated the abnormal kink effect in n‐type LTPS TFTs with BSM, especially, which is contacted by source electrode. Using experiments and TCAD simulation, we confirmed and analyzed that this kink characteristic is induced by source contacted BSM and strongly dependent on Active‐Buffer layer thickness, LDD length, and BSM length.