44‐2: Separation Process using Commercially Available Polyimide or Acrylic with Linear Laser | Zendy

Idojiri Satoru | Zendy; Ohno Masakatsu | Zendy; Sato Masataka | Zendy; Ikezawa Naoki | Zendy; Yasumoto Seiji | Zendy; Kumakura Kayo | Zendy; Adachi Hiroki | Zendy; Okazaki Kenichi | Zendy; Yamazaki Shunpei | Zendy

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44‐2: Separation Process using Commercially Available Polyimide or Acrylic with Linear Laser

Author(s) -

Idojiri Satoru,

Ohno Masakatsu,

Sato Masataka,

Ikezawa Naoki,

Yasumoto Seiji,

Kumakura Kayo,

Adachi Hiroki,

Okazaki Kenichi,

Yamazaki Shunpei

Publication year - 2017

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1002/sdtp.11717

Subject(s) - polyimide , materials science , laser , layer (electronics) , irradiation , substrate (aquarium) , crystallization , composite material , optics , chemical engineering , oceanography , physics , engineering , nuclear physics , geology

The use of a buffer layer in a separation layer containing commercial polyimide or acrylic allows normal laser separation without using special laser irradiation, even if foreign particles (approximately 1 mmΦ) are attached to a glass substrate. A linear laser used for the crystallization of low‐temperature polysilicon can be used.

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