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44‐2: Separation Process using Commercially Available Polyimide or Acrylic with Linear Laser
Author(s) -
Idojiri Satoru,
Ohno Masakatsu,
Sato Masataka,
Ikezawa Naoki,
Yasumoto Seiji,
Kumakura Kayo,
Adachi Hiroki,
Okazaki Kenichi,
Yamazaki Shunpei
Publication year - 2017
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.11717
Subject(s) - polyimide , materials science , laser , layer (electronics) , irradiation , substrate (aquarium) , crystallization , composite material , optics , chemical engineering , oceanography , physics , engineering , nuclear physics , geology
The use of a buffer layer in a separation layer containing commercial polyimide or acrylic allows normal laser separation without using special laser irradiation, even if foreign particles (approximately 1 mmΦ) are attached to a glass substrate. A linear laser used for the crystallization of low‐temperature polysilicon can be used.