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54‐1: Parallel Fabrication for Integration of Electronic and Microelectromechanical Systems
Author(s) -
Schalberger Patrick,
Al Nusayer Sheikh Abdullah,
Raichle Cornelius
Publication year - 2016
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.10737
Subject(s) - microelectromechanical systems , fabrication , schottky diode , transducer , materials science , process (computing) , ultrasonic sensor , transductor , optoelectronics , diode , electronic engineering , computer science , electrical engineering , engineering , acoustics , medicine , alternative medicine , physics , pathology , operating system
We have developed a four mask top gate a‐Si:H based process that allows for the parallel production of TFTs, Schottky diodes and surface MEMS elements on large area glass substrates. Simple electronical and micromechanical devices as well as a complex active matrix driven MEMS display demonstrator have been produced for process verification. Furthermore, the process seems to be feasible for applications like ultrasonic transducers or energy harvesting.