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Paper No S12.3: Influence of Layer Thickness and Homogeneity on Contactless Deposited High‐Performance Indium Oxide Thin‐Film Transistors
Author(s) -
Meyer S.,
Grenz S.,
Merkulov A.,
Renner G.,
Anselmann R.,
Schmechel R.
Publication year - 2015
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.10530
Subject(s) - marl , engineering physics , engineering , nanotechnology , materials science , geology , structural basin , paleontology
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