Premium
Paper No P14: Key Technology of 8G In‐Line Deposition System for OLED TV
Author(s) -
Choi Myungwoon,
Yu Kownkuk,
Jeon Okchul,
Lee Sangmin,
Kim Sungmoon,
Kim Hyungmin,
Seo Jeongguk,
Jeong Kwangho
Publication year - 2015
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.10496
Subject(s) - oled , production line , line (geometry) , optoelectronics , materials science , deposition (geology) , diode , engineering , mechanical engineering , nanotechnology , geology , geometry , mathematics , layer (electronics) , paleontology , sediment
In this report, the new production line for organic light‐emitting diode (OLED) display to overcome hurdles in OLED TV production is described. Instead of conventional cluster system, we adopted in‐line system with linear nozzle source (LNS), gluon chuck, and speed buffer (SB) system. The thickness uniformities of organic layers evaporated are well controlled within 3% over the area of 2200 × 2500 mm 2 . The glass was horizontally moved from chuck chamber to dechuck chamber by gluon chuck with glass sagging less than 3 mm. Using SB systems, the distance between masks can be controlled by 10 mm. The efficiency of the system is obtained about 60%. Most effective in‐line system is developed and applied to the mass production of OLED TV.