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Paper No P12: Transparent Conductive Electrode Based on Hydrogen Doped Zinc Oxide for OLED Application
Author(s) -
Chen Shuming,
Wang Sisi
Publication year - 2015
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.10487
Subject(s) - materials science , electrode , thin film transistor , optoelectronics , oled , electrical conductor , doping , active matrix , fabrication , sheet resistance , flexible display , transparent conducting film , backplane , nanotechnology , electrical engineering , composite material , chemistry , layer (electronics) , medicine , alternative medicine , pathology , engineering
A transparent and conductive electrode based on hydrogen (H) doped ZnO has been proposed for active‐matrix (AM) display applications. With optimal H plasma power and treat time, the resultant ZnO:H exhibits a low sheet resistance of 200 ohm/sq at a thickness of 150 nm. The demonstrated transparent and conductive ZnO:H can serve as electrode for LCD or OLED as well as S/D electrode for ZnO TFT. With proposed ZnO:H electrode, two photomask steps can be reduced in the fabrication of ZnO TFT‐based AM backplanes.