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P‐65: Advanced Processing of ITO and IZO Thin Films on Flexible Glass
Author(s) -
Junghähnel Manuela,
Weller Stephanie,
Gebel Thoralf
Publication year - 2015
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.10131
Subject(s) - materials science , transmittance , sheet resistance , annealing (glass) , flashing , thin film , optoelectronics , sputter deposition , sputtering , thin film transistor , electrical conductor , composite material , nanotechnology , metallurgy , layer (electronics)
Ultra‐thin 100µm thick flexible glasses with a maximum dimension of 250×300 mm 2 were deposited with transparent conductive ITO and IZO using in‐line magnetron sputtering under pilot scale conditions. The flexible glass was coated at room temperature with ITO and IZO and further refined by dynamic flash lamp annealing (FLA) in the millisecond range. After flashing the films, we achieved an improved transmittance and a reduced sheet resistance of the films.