P‐93: Highly Reliable Mobile Liquid Crystal Display using AIO x  Deposited By Atomic Layer Deposition for Side Sealing Structure | Zendy

Ishitani Tetsuji | Zendy; Kubota Daisuke | Zendy; Nakano Masaru | Zendy; Kubota Yusuke | Zendy; Moriya Koji | Zendy; Yamashita Akio | Zendy; Sakurada Yujiro | Zendy; Kusunoki Koji | Zendy; Shishido Hideaki | Zendy; Sugimoto Kazuya | Zendy; Hirakata Yoshiharu | Zendy; Yamazaki Shunpei | Zendy; Hayakawa Masahiko | Zendy

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P‐93: Highly Reliable Mobile Liquid Crystal Display using AIO x Deposited By Atomic Layer Deposition for Side Sealing Structure

Author(s) -

Ishitani Tetsuji,

Kubota Daisuke,

Nakano Masaru,

Kubota Yusuke,

Moriya Koji,

Yamashita Akio,

Sakurada Yujiro,

Kusunoki Koji,

Shishido Hideaki,

Sugimoto Kazuya,

Hirakata Yoshiharu,

Yamazaki Shunpei,

Hayakawa Masahiko

Publication year - 2015

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1002/sdtp.10052

Subject(s) - atomic layer deposition , layer (electronics) , liquid crystal display , deposition (geology) , materials science , optoelectronics , reliability (semiconductor) , sealant , crystal structure , composite material , crystallography , chemistry , paleontology , power (physics) , physics , quantum mechanics , sediment , biology

A side sealing structure including, outside a sealant, AlOx deposited using an atomic layer deposition (ALD) apparatus was employed. This structure can prevent the entry of external moisture. A liquid crystal display (LCD) with this type of structure can have long‐term high reliability as a low‐frequency driving LCD.

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