Premium
P‐93: Highly Reliable Mobile Liquid Crystal Display using AIO x Deposited By Atomic Layer Deposition for Side Sealing Structure
Author(s) -
Ishitani Tetsuji,
Kubota Daisuke,
Nakano Masaru,
Kubota Yusuke,
Moriya Koji,
Yamashita Akio,
Sakurada Yujiro,
Kusunoki Koji,
Shishido Hideaki,
Sugimoto Kazuya,
Hirakata Yoshiharu,
Yamazaki Shunpei,
Hayakawa Masahiko
Publication year - 2015
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.10052
Subject(s) - atomic layer deposition , layer (electronics) , liquid crystal display , deposition (geology) , materials science , optoelectronics , reliability (semiconductor) , sealant , crystal structure , composite material , crystallography , chemistry , paleontology , power (physics) , physics , quantum mechanics , sediment , biology
A side sealing structure including, outside a sealant, AlOx deposited using an atomic layer deposition (ALD) apparatus was employed. This structure can prevent the entry of external moisture. A liquid crystal display (LCD) with this type of structure can have long‐term high reliability as a low‐frequency driving LCD.