Open AccessUse of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope
Author(s) -
Wells O. C.,
Gignac L. M.,
Murray C. E.,
Frye A.,
Bruley J.
Publication year - 2006
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950280105
Subject(s) - scanning electron microscope , detector , optics , electron , materials science , environmental scanning electron microscope , crystallite , electron beam induced deposition , signal (programming language) , cathode ray , scanning transmission electron microscopy , conventional transmission electron microscope , electron microscope , physics , computer science , programming language , quantum mechanics , metallurgy
The backscattered electron (BSE) signal in the scanning electron microscope (SEM) can be used in two different ways. The first is to give a BSE image from an area that is defined by the scanning of the electron beam (EB) over the surface of the specimen. The second is to use an array of small BSE detectors to give an electron backscattering pattern (EBSP) with crystallographic information from a single point. It is also possible to utilize the EBSP detector and computer‐control system to give an image from an area on the specimen‐for example, to show the orientations of the grains in a polycrystalline sample (“grain orientation imaging”). Some further possibilities based on some other ways for analyzing the output from an EBSP detector array, are described.