Open AccessAccuracy and precision of quantitative energy‐dispersive x‐ray spectrometry in the environmental scanning electron microscope
Author(s) -
Carlton Robert A.,
Lyman Charles E.,
Roberts James E.
Publication year - 2004
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950260404
Subject(s) - scanning electron microscope , analytical chemistry (journal) , relative standard deviation , x ray , materials science , mass spectrometry , copper , chemistry , optics , physics , chromatography , detection limit , metallurgy , composite material
The accuracy and precision of quantitative energy‐dispersive x‐ray spectrometry in the environmental scanning electron microscope have been estimated using a series of copper / gold alloys of known composition. The mean values (five to six replicate experiments) had relative errors within ± 5%, and most were within ± 3.5%. All relative standard deviations were < 5% and most were < 3%. Since the standard specimens were large (∼500 μm) in diameter, electron scattering in the 2 torr of water vapor above the specimen did not affect the results. This level of accuracy and precision was possible only by using a novel specimen surface charge neutralization scheme.