Accuracy and precision of quantitative energy‐dispersive x‐ray spectrometry in the environmental scanning electron microscope

The accuracy and precision of quantitative energy‐dispersive x‐ray spectrometry in the environmental scanning electron microscope have been estimated using a series of copper / gold alloys of known composition. The mean values (five to six replicate experiments) had relative errors within ± 5%, and most were within ± 3.5%. All relative standard deviations were < 5% and most were < 3%. Since the standard specimens were large (∼500 μm) in diameter, electron scattering in the 2 torr of water vapor above the specimen did not affect the results. This level of accuracy and precision was possible only by using a novel specimen surface charge neutralization scheme.