Open AccessLight collection efficiency and light transport in backscattered electron scintillator detectors in scanning electron microscopy
Author(s) -
Filippov M. N.,
Rau E. I.,
Sennov R. A.,
Boyde A.,
Howell R. G. T.
Publication year - 2001
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950230503
Subject(s) - scintillator , detector , electron , scanning electron microscope , optics , materials science , microscopy , secondary electrons , physics , optoelectronics , nuclear physics
Experimentally, scintillator detectors used in scanning electron microscopy (SEM) to record backscattered electrons (BSE) show a noticeable difference in detection efficiency in different parts of their active zones due to light losses transport in the optical part of the detector. A model is proposed that calculates the local efficiency of the active parts of scintillator detectors of arbitrary shapes. The results of these calculations for various designs are presented.