Open AccessAn anomalous contrast in scanning electron microscopy of insulators: The pseudo‐mirror effect
Author(s) -
Belhaj M.,
Jbara O.,
Odof S.,
Msellak K.,
Rau E. I.,
Andrianov M. V.
Publication year - 2000
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950220603
Subject(s) - electron , cathode ray , contrast (vision) , secondary electrons , trapping , penetration depth , scanning electron microscope , distortion (music) , electric field , optics , electron microscope , materials science , penetration (warfare) , low voltage electron microscope , atomic physics , physics , condensed matter physics , electron beam induced deposition , optoelectronics , quantum mechanics , ecology , amplifier , cmos , biology , operations research , engineering
In a scanning electron microscope, electron‐beam irradiation of insulators may induce a strong electric field due to the trapping of charges within the specimen interaction volume. On one hand, this field modifies the trajectories of the beam of electrons subsequently entering the specimen, resulting in reduced penetration depth into the bulk specimen. On the other hand, it leads to the acceleration in the vacuum of the emitted secondary electrons (SE) and also to a strong distortion of their angular distribution. Among others, the consequences concern an anomalous contrast in the SE image. This contrast is due to the so‐called pseudo‐mirror effect. The aim of this work is first to report the observation of this anomalous contrast, then to give an explanation of this effect, and finally to discuss the factors affecting it. Practical consequences such as contrast interpretations will be highlighted.