Open AccessCharging control using pulsed scanning electron microscopy
Author(s) -
Wong W. K.,
Phang J. C. H.,
Thong J. T. L.
Publication year - 1995
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950170508
Subject(s) - materials science , scanning electron microscope , cathode ray , voltage , electron , optics , optoelectronics , composite material , electrical engineering , physics , engineering , quantum mechanics
This paper describes a novel method to observe highly charging specimens at high‐beam voltages without specimen preparation. It is found that the technique greatly reduces charging artifacts such as image shift, astigmatism, and defocussing without sacrificing image quality. Images obtained of uncoated specimens are found to be comparable to gold‐coated specimens and without exhibiting charging effects. The technique also allows the study of charge distribution effects in specimen charging of which very little understanding exists, particularly as far as the spatial and time‐dependent properties of charging are concerned.