A new method of compositional image formation by a four‐element backscattered electron detector in an SEM | Zendy

Mityukhlyaev V. B. | Zendy; Dyukov V. G. | Zendy

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A new method of compositional image formation by a four‐element backscattered electron detector in an SEM

Author(s) -

Mityukhlyaev V. B.,

Dyukov V. G.

Publication year - 1994

Publication title -

scanning

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.359

H-Index - 47

eISSN - 1932-8745

pISSN - 0161-0457

DOI - 10.1002/sca.4950160103

Subject(s) - dimensionless quantity , scanning electron microscope , detector , materials science , optics , electron , mixing (physics) , sample (material) , electron microscope , surface (topology) , analytical chemistry (journal) , chemistry , physics , geometry , mathematics , mechanics , quantum mechanics , chromatography

A special mixing procedure for signals from a four element backscattered electron (BSE) detector is proposed for compositional image formation when a sample with a rough surface is examined by a scanning electron microscope (SEM). The new method allows appreciable suppression of the influence of the sample surface topography in a compositional mode for take‐off angles less than about 30°, relative to the microscope axis. The theoretical approach based on the analysis of BSE angular distribution is compared with the experiment. The mixing procedure uses a dimensionless parameter, which depends mainly on take‐off angle. Photographs of the Ge‐Zn structure with its rough surface were taken in conventional and proposed compositional modes for take‐off angle 11° and electron energy 20 keV and show a considerable suppression of the topographic effect when the new method is used.

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