Open AccessA simple backscattered electrons and specimen current detection device for the scanning electron microscope
Author(s) -
Viturro H.,
Peez C.,
Bonetto R. D.,
Alvarez A. G.
Publication year - 1993
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950150409
Subject(s) - electron , optics , detector , materials science , aperture (computer memory) , signal (programming language) , current (fluid) , microscope , enhanced data rates for gsm evolution , lens (geology) , scanning electron microscope , physics , acoustics , computer science , telecommunications , quantum mechanics , thermodynamics , programming language
A simple, low‐investment device has been developed that allows the collection of backscattered electrons (BSEs) and specimen current (SC) signals for imaging purposes and current measurement. Originally, this system was designed for detection, measurement, and display of specimen current, with a video signal output whose level was modulated by this current. Eventually, a BSE detector was developed, using a graphite disk (about 8 cm in diameter) to collect the BSEs. The disk was mounted on a Philips SEM 5O5, attached and concentrically to the final lens aperture. This configuration gives a large solid angle of collection. The collected charge is further processed by the same electronics used in the aforementioned SC detection system. Electron channeling, topographic contrast with BSE, and material contrast with BSE and SC images can be obtained with reasonably good edge definition.