
The utility of an on‐line digital image recording system for SEM
Author(s) -
Oho E.,
Kanaya K.
Publication year - 1990
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950120305
Subject(s) - computer science , line (geometry) , computer vision , digital image , computer graphics (images) , digital image processing , image (mathematics) , image processing , artificial intelligence , digital imaging , digital recording , computer hardware , mathematics , geometry
An on‐line digital image processing system provides several useful functions to SEM users. It is especially convenient for general SEM image storing and filing, preferable to conventional methods using video monitor, camera, and film. When equipped with state‐of‐the‐art magneto‐optical disk unit (external memory) and a video copy processor for printout of a digital SEM image, its usefulness is enhanced. In order to validate this useful function, we compare a modern on‐line digital image recording system with a conventional one, from the viewpoint of the general SEM user.