Open Access
The application of low‐voltage scanning electron microscopy for the analysis of VLSI devices
Author(s) -
Woodward M.,
Jones D. R.
Publication year - 1989
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950110407
Subject(s) - library science , psychology , gerontology , medicine , computer science