Open AccessA PC‐AT‐based system for the acquisition of SEM images
Author(s) -
Morandi C.,
Vanzi M.,
Bianco F.,
Neri R.
Publication year - 1989
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950110203
Subject(s) - data acquisition , biasing , computer science , voltage , interface (matter) , contrast (vision) , image quality , state (computer science) , grey level , computer hardware , artificial intelligence , computer vision , electronic engineering , image (mathematics) , electrical engineering , engineering , operating system , bubble , algorithm , maximum bubble pressure method
A system for the acquisition of high‐quality DDVC (digital differential voltage contrast) images based on a low‐cost personal computer and a dedicated scanning electron microscope interface is described. It is capable of obtaining high‐quality voltage contrast maps of passivated integrated circuits even on supply lines, which are not usually seen due to static biasing. Grey‐level and colour image‐comparison utilities allow effective state‐by‐state comparison of a failed device with a good one, and are extremely useful for failure analyses.