
Computer‐aided imaging: Quantitative compositional mapping with the electron probe microanalyzer
Author(s) -
Newbury D. E.,
Marinenko R. B.,
Bright D. S.,
Myklebust R. L.
Publication year - 1988
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950100603
Subject(s) - electron microprobe , computer science , electron probe microanalysis , artificial intelligence , image processing , microanalysis , materials science , computer vision , computer graphics (images) , analytical chemistry (journal) , biological system , chemistry , image (mathematics) , mineralogy , organic chemistry , chromatography , biology
X‐ray area scanning (“dot mapping”) is a technique widely used in electron probe microanalysis for determining the spatial distribution of elemental constituents. Although powerful, this technique is subject to significant limitations on concentration sensitivity and flexibility for subsequent processing. The new technique of compositional mapping overcomes these limitations. In compositional mapping, a complete quantitative electron probe analysis is carried out at each point of a matrix scan. The resulting matrices of concentration values can be assembled into images in a digital image processor by assigning gray or color intensities to the actual concentrations rather than the raw spectral intensities. Digital compositional maps can be readily manipulated by a wide variety of image processing techniques to improve the visibility of features of interest.