Open AccessVLSI metrology using an automatic beam‐scanning confocal laser microscope
Author(s) -
Zapf Th.,
WijnaendtsVanResandt R. W.
Publication year - 1988
Publication title -
scanning
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950100408
Subject(s) - metrology , library science , citation , confocal , computer science , optics , physics