Open AccessSignal of backscattered electrons at edges and surface steps in dependence on surface tilt and take‐off direction
Author(s) -
Reimer L.,
Riepenhausen M.,
Schierjott M.
Publication year - 1986
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950080404
Subject(s) - physics , computer science , engineering physics