Open AccessElectron optical characteristics of a concave electrostatic electron mirror for a scanning electron microscope
Author(s) -
Hamarat R. T.,
Witzani J.,
Hörl E. M.
Publication year - 1984
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950060104
Subject(s) - electron , scanning electron microscope , optics , electron microscope , deflection (physics) , electron optics , curved mirror , environmental scanning electron microscope , electrostatic lens , electron tomography , conventional transmission electron microscope , materials science , scanning transmission electron microscopy , physics , atomic physics , quantum mechanics
Numerical computer calculations are used to explore the design characteristics of a concave electrostatic electron mirror for a mirror‐attachment for a conventional scanning electron microscope or an instrument designed totally as a scanning electron mirror microscope. The electron paths of a number of set‐ups are calculated and drawn graphically in order to find the optimum shape and dimensions of the mirror geometry. This optimum configuration turns out to be the transition configuration between two cases of electron path deflection, towards the optical axis of the system and away from it.