Open AccessSources of contamination in electron optical equipment
Author(s) -
Love G.,
Scott V. D.,
Dennis N. M. T.,
Laurenson L.
Publication year - 1981
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950040105
Subject(s) - contamination , condensation , electron , environmental science , materials science , process engineering , environmental chemistry , computer science , chemistry , physics , engineering , nuclear physics , ecology , biology , thermodynamics
Contamination in electron optical equipment may occur in the form of carbonaceous deposit on the specimen undergoing analysis or condensation and/or polymerisation of extraneous matter upon other components of the instrument. Almost without exception these effects are undesirable and in this paper we review sources of contamination and discuss methods of minimising the problem.