Open AccessSIMS instrumentation and imaging techniques
Author(s) -
Liebl H.
Publication year - 1980
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950030203
Subject(s) - microanalysis , secondary ion mass spectrometry , electron probe microanalysis , instrumentation (computer programming) , profiling (computer programming) , analytical chemistry (journal) , ion , mass spectrometry , chemistry , resolution (logic) , materials science , high resolution , mineralogy , electron microprobe , computer science , chromatography , remote sensing , geology , artificial intelligence , organic chemistry , operating system
Secondary ion mass spectrometry (SIMS) has evolved as a technique for characterizing solids and surfaces which is distinguished by high sensitivity and its applicability to all elements. It can be used for surface research, in‐depth concentration profiling, isotopic work, and the identification of compounds. Combined with imaging techniques, these applications can be made with high spatial resolution. In this respect, ion probe microanalysis complements electron probe microanalysis (XRMA and scanning AES).